Influence of <TEX>$Ar^+$</TEX> ion Bombardment on the Chemical States of <TEX>${SrBi_2}{Ta_2}{O_9}$</TEX> Thin Films Fabricated by Metal-Organic Decomposition

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J. Korean Ceram. Soc. > Volume 37(11); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(11): 1084.

$Ar^+$이온 충격이 MOD 법에 의해 제조된 ${SrBi_2}{Ta_2}{O_9}$박막의 화학 상태에 미치는 영향

박윤백, 조광준, 이문근, 허성, 이태권, 김호정, 민경열, 이순영, 김일욱

현대전자주식회사 메모리연구소

Influence of $Ar^+$ ion Bombardment on the Chemical States of ${SrBi_2}{Ta_2}{O_9}$ Thin Films Fabricated by Metal-Organic Decomposition

Key words: $Ar^+$ Ion, Bombardment, ${SrBi_2}{Ta_2}{O_9}$, Ferroelectric, Perovskite structure, Chemical states

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