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J. Korean Ceram. Soc. > Volume 38(9); 2001 > Article
Journal of the Korean Ceramic Society 2001;38(9): 777.
Effects of Drying Temperature on the $LiCoO_2$ Thin Films Fabricated by Sol-gel Method
Mun-Kyu Kim, Kyu-Sung Park, Duk-Su Kim, Jong-Tae Son, Ho-Gi Kim
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
$LiCoO_{2}$ thin films have received attention as cathodes of thin film microbatteries in these days. In this study, $LiCoO_{2}$ thin films are fabricated by a sol-gel spin coating method followed by a post-annealing process. The thermal decomposition behaviour of precursor is investigated by TG/DTA analysis. The change of crystallinity, microstructure and electrochemical properties of final films as the drying temperature changes are also studied by XRD, SEM and galvanostatic charge/discharge cycling test. The relationship between the discharge capacity and the drying temperature are intensively investigated in this work.
Key words: $LiCoO_{2}$, Thin film, Microbattery, Sol-gel spin coating method, Drying
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