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J. Korean Ceram. Soc. > Volume 37(10); 2000 > Article
Journal of the Korean Ceramic Society 2000;37(10): 1014.
RF Magnetron sputtering을 이용한 ${Ce_{1-x}}{RE_x}{O_{2-y}}$ 박막성장
주성민, 김철진, 박병규1
경상대학교 첨단소재연구소
1서울산업대학교
The growth of ${Ce_{1-x}}{RE_x}{O_{2-y}}$ Thin Films by RF Magnetron Sputtering
Key words: Ceria, RF magnetron sputtering, Thin films, Preferred orientation
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