Electrical Properties of <TEX>${Ba_{0.5}}{Sr_{0.5}}{TiO_3}$</TEX>Thin Film with Various Heat Treatment Conditions

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J. Korean Ceram. Soc. > Volume 38(5); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(5): 492.

다양한 열처리 조건에 따른 ${Ba_{0.5}}{Sr_{0.5}}{TiO_3}$박막의 전기적 특성

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부산대학교 재료공학부

Electrical Properties of ${Ba_{0.5}}{Sr_{0.5}}{TiO_3}$Thin Film with Various Heat Treatment Conditions

Key words: BST, Thin film, Capacitor, Sputtering, Dielectric constant, Leakage current

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