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J. Korean Ceram. Soc. > Volume 37(8); 2000 > Article
Journal of the Korean Ceramic Society 2000;37(8): 731.
열처리방법에 따른 ${K_3}{Li_2}{Nb_5}{O_{15}}$(KLN)박막의 제작
김광태, 박명식1, 이동욱1, 조상희
경북대학교 무기재료공학과
Preparation of ${K_3}{Li_2}{Nb_5}{O_{15}}$(KLN) Thin Films by Heat Treatment Methods
1Cluster Instruments Co. Ltd.
KLN(K3Li2Nb5O15) has attracted a great deal of attention for their potential usefulness in piezoelectric, electro-optic, nonlinear optic, and pyroelectirc devices. Especially, the KLN single crystal has been studied in the field of optics and electronics. However it is hard to produce good quality single crystals due to the crack propagation during crystal growing. One of the solutions of this problem is prepartion of thin film. But the intensive study has not been conducted so far. In this study, after the KLN thin film were prepared by R.F. magnetron Sputtering method on SiO2/Si substrate, the post-annealing methods of RTA(rapid thermal annealin) and IPA(insitu post annealing) were employed. The deposition condition of KLN thin film was RF power(100 W), Working pressure(100 mtorr). The commonness of both RAT and IPA was that the higher were deposition and post annealing temperature, the higher was the intensity of XRD but the less surface roughness. The difference of post-annealing methods affected XRD phase and surface condition very much. And in IPA process, the influence of O2 had much effect on the formation of KLN phase.
Key words: KLN, Heat treatment methods
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