A Study on the TiN Thin Film by Sol-Gel Method

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J. Korean Ceram. Soc. > Volume 29(4); 1992 > Article

Journal of the Korean Ceramic Society 1992;29(4): 328.

졸-겔 방법으로 제조한 TiN 박막에 관한 연구

김왕섭, 선효님¹, 김경용¹, 김병호

고려대학교 재료공학과
¹한국과학기술연구원 세라믹스공정실

A Study on the TiN Thin Film by Sol-Gel Method

ABSTRACT

TiO2 sols were prepared by hydrolysis and polymerization of titanium tetra-isopropoxide (TTIP) in the presence of diethanolamine (DEA). The optimal mole ratio of water to TTIP is 2 and the concentration of the TiO2 sol 0.7 M. Golden TiN films without cracks were obtained by dipping Si(110) wafers into the TiO2 sol and followed by nitridation in NH3 at 1100$^{circ}C$ for 5 h. The TiN films were studied by an optical microscope, DTA, TGA and X-ray analysis.