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Change of Refractive Index and Residual Stresses of Ta
2
O
5
Thin Film Prepared by Dual
Ion Beam Sputtering
Deposition as the Substrate Temperature and Assist ion Beam Energy
Seok-Gyu Yeon, Yong-Tak Kim, Hwek-Yung Kim, Myoung-Jin Kim, Hyung-Man Lee, Dae-Ho Yoon
J. Korean Ceram. Soc.
2005;42(1):28
DOI:
https://doi.org/10.4191/kcers.2005.42.1.028
Cited By 1
Effect of O
2
Partial Pressure on AlO
x
Thin Films Prepared by Reactive
Ion Beam Sputtering
Deposition
Jin-Wook Seong, Ki-Hyun Yoon, Ki-Hwan Kim, Young-Whoan Beag, Seok-Keun Koh
J. Korean Ceram. Soc.
2004;41(5):364
DOI:
https://doi.org/10.4191/kcers.2004.41.5.364
Characteristics Analysis and Manufacture of Ta
2
O
5
Thin Films Prepared by Dual Ion-beam Sputtering Deposition with Change of Ar/O
2
Gas Flow Rate of Assist Ion Beam
윤석규, 김회경, 김근영, 김명진, 이형만, 이상현, 황보창권, 윤대호
J. Korean Ceram. Soc.
2003;40(12):1165
DOI:
https://doi.org/10.4191/kcers.2003.40.12.1165
The Sensitivity of Ultra Thin Pd-doped SnO
$_2$
Gas Snesor Fabricated by Ion-Assisted Deposition for Methane Gas
조정, 조준식, 윤기현, 김현주, 최원국, 정형진, 고석근
J. Korean Ceram. Soc.
1998;35(8):795
Magnetic and Electrical Properties of Mn-Zn Ferrite Thin Films Deposited by
Ion Beam Sputtering
조해석, 하상기, 이대형, 주한용, 김형준, 김경용, 제해준, 유병두
J. Korean Ceram. Soc.
1995;32(3):313
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5