The Sensitivity of Ultra Thin Pd-doped SnO<TEX>$_2$</TEX> Gas Snesor Fabricated by Ion-Assisted Deposition for Methane Gas

,; ,; ,; ,; ,; ,; ,; ,; ,; ,; ,; ,; ,; ,

J. Korean Ceram. Soc. > Volume 35(8); 1998 > Article

Journal of the Korean Ceramic Society 1998;35(8): 795.

이온빔 보조 증착법을 이용항 제작된 SnO$_2$에 초박막 Pd가 첨가된 박막형 가스센서의 메탄가스 감지특성

조정, 조준식, 윤기현¹, 김현주², 최원국, 정형진³, 고석근

한국과학기술원 박막기술연구센터
¹연세대학교 세라믹공학과
²충주산업대학교 교양과학부
³한국과학기술원 박막기술연구센

The Sensitivity of Ultra Thin Pd-doped SnO$_2$ Gas Snesor Fabricated by Ion-Assisted Deposition for Methane Gas

ABSTRACT

SnO2 thin films were fabricated by reactive ion-assisted deposition(R-IAD) and metallic Pd layer with 30 $AA$ in thickness as a catalyst was sub-surface diffused on SnO2 thin film in two different ways by ion beam sputtering the first it was in-situ deposited on pre-heated substrate at 30$0^{circ}C$ with cooling down for 1 hr and the second it was annealed at 30$0^{circ}C$ in the air atmosphere for 1 hr. The sensor with surface adsorbed Pb layer in vacuum showed 4-5 times higher sensitivity to CH4 than that of the sensor annealed in the air From the XPS analyses

Key words: SnO$_2$, thin film, Reactive ion-assisted deposition, Ultra-thin Pd layer, Ion beam sputtering, Sputtering, Spill-over