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Effect of Working Pressure and Substrate Bias on Phase Formation and Microstructure of Cr-Al-N Coatings
Seon-A Choi, Seong-Won Kim, Sung-Min Lee, Hyung-Tae Kim, Yoon-Suk Oh
J. Korean Ceram. Soc.
2017;54(6):511-517. Published online November 29, 2017
DOI:
https://doi.org/10.4191/kcers.2017.54.6.05
Cited By 4
Anti-reflection Coating of Silicon Nitride Film for Solar Cell by RF
Magnetron Sputtering
Kyoon Choi, Eui-Seok Choi, Jin-Ha Hwang, Soo-Hong Lee
J. Korean Ceram. Soc.
2007;44(10):585
DOI:
https://doi.org/10.4191/kcers.2007.44.1.585
Microstructure and Magnetic Properties of Pulsed DC Magnetron Sputtered Zn
0.8
Co
0.2
O Film Deposited at Various Substrate Temperatures
Young-Hun Kang, Bong-Seok Kim, Weon-Pil Tai, Ki-Chul Kim, Su-Jeung Suh, Tae-Seok Park, Young-Sung Kim
J. Korean Ceram. Soc.
2006;43(2):79
DOI:
https://doi.org/10.4191/kcers.2006.43.2.079
Microstructure and Magnetic Properties of Zn
1-x
Co
x
O Film Prepared by Pulsed DC
Magnetron Sputtering
Yoon-Duk Ko, Seok-Bae Ko, Moon-Soon Choi, Weon-Pil Tai, Ki-Chul Kim, Jong-Min Kim, Su-Jeung Soh, Young-Sung Kim
J. Korean Ceram. Soc.
2005;42(3):211
DOI:
https://doi.org/10.4191/kcers.2005.42.3.211
Effects of Oxygen Flow Ratio on the Crystallographic Orientation of NiO Thin Films Deposited by RE
Magnetron Sputtering
류현욱, 최광표, 노효섭, 박용주, 박진성
J. Korean Ceram. Soc.
2004;41(2):106
DOI:
https://doi.org/10.4191/kcers.2004.41.2.106
Cited By 1
Deposition Characteristic of InN
x
Films by Reactive DC
Magnetron Sputtering
송풍근, 류봉기, 김광호
J. Korean Ceram. Soc.
2003;40(8):739
DOI:
https://doi.org/10.4191/kcers.2003.40.8.739
Microstructure Control of Tungsten Film for Bragg Reflectors of Thin Film Bulk Acoustic Wave Resonators
강성철, 이시형, 박종완, 이전국
J. Korean Ceram. Soc.
2003;40(3):268
DOI:
https://doi.org/10.4191/kcers.2003.40.3.268
Cited By 1
Anode Characteristics of Tin Oxide Thin Films According to Various Si Additions for Lithium Secondary Microbattery
박건태, 박철호, 손영국
J. Korean Ceram. Soc.
2003;40(1):69
DOI:
https://doi.org/10.4191/kcers.2003.40.1.069
Electrical Properties of Sputtered Gallium-doped Zinc Oxide Films Deposited Using Ne, Ar, or Kr Gas
Pung-Keun Song, Bong-Ki Ryu, Kwang-Ho Kim
J. Korean Ceram. Soc.
2002;39(10):935
DOI:
https://doi.org/10.4191/kcers.2002.39.10.935
Cited By 1
The Effect of Residual H
2
Pressure on Gallium-doped ZnO Films Deposited by
Magnetron Sputtering
Pung-Keun Song, Young-Jun Kwon, Jae-Min Cha, Byung-Chul Lee, Bong-Ki Ryu, Kwang-Ho Kim
J. Korean Ceram. Soc.
2002;39(10):928
DOI:
https://doi.org/10.4191/kcers.2002.39.10.928
Cited By 1
The Fabrication of ITO Thin-film O
3
Gas Sensors Using R.F.
Magnetron Sputtering
Method and their Characterization
Jung-Bum Kwon, Kyoung-Keun Jung, Dong-Su Lee, Jo-Woong Ha, Kwang-Soo Yoo
J. Korean Ceram. Soc.
2002;39(9):840
DOI:
https://doi.org/10.4191/kcers.2002.39.9.840
Cited By 3
Fabrication and Characterization of Sn
1-x
SixO
2
Anode for Lithium Secondary Battery by R.F.
Magnetron Sputtering
Method
Sang-Heon Lee, Keun-Tae Park, Young-Guk Son
J. Korean Ceram. Soc.
2002;39(4):394
DOI:
https://doi.org/10.4191/kcers.2002.39.4.394
Cited By 1
Fabrication of Lithium Nickel Cobaltate Thin-film for the Cathode Material of Microbattery
Duksu Kim, Mun-Kyu Kim, Jong-Tae Son, Ho-Gi Kim
J. Korean Ceram. Soc.
2001;38(8):683
The growth of
${Ce_{1-x}}{RE_x}{O_{2-y}}$
Thin Films by RF
Magnetron Sputtering
주성민, 김철진, 박병규
J. Korean Ceram. Soc.
2000;37(10):1014
Fabrication and Characterization of
${LiMn_2}{O_4}$
Cathode for Lithium Rechargeable Battery by R.F.
Magnetron Sputtering
우태욱, 손영국
J. Korean Ceram. Soc.
2000;37(6):552
A Study on the Dielectric Properties of (BaBi
$_{0.5}$
Sr
$_{0.5}$
)TiO
$_3$
Thin Films Diffused with PbO-Bi
$_2$
O
$_3$
-B
$_2$
O
$_3$
Layer
김진철, 진병태, 박원모, 남산, 김명호, 변재동
J. Korean Ceram. Soc.
1998;35(9):895
Dielectric and Pyroelectric Properties of
$Ba_{0.67}$
Sr
${0.33)2$
TiO
$_3$
Thin Plates and Films
이문희, 조성걸, 이상기
J. Korean Ceram. Soc.
1998;35(7):679
Microstructure and Electric Properties of Ferroelectric SrBi
$_2$
Ta
$_2$
O
$_9$
Thin Films Deposited by Modified Rf
Magnetron Sputtering
Technique
양철훈, 윤순길
J. Korean Ceram. Soc.
1998;35(5):472
Characterization of Ferroelectric
$SrBi_2Ta_2O_9$
Thin Films Deposited by RF
Magnetron Sputtering
With Various Annealing Temperatures
박상식, 양철훈, 윤순길, 안준형, 김호기
J. Korean Ceram. Soc.
1997;34(2):202
Study on Properties of Antimony-doped Tin Oxide Thin Films Prepared by Sputtering
김층완, 김광호, 이환수, 이혜용
J. Korean Ceram. Soc.
1996;33(7):735
Preparation of ATO Thin Films by DC
Magnetron Sputtering
(II)Electrical Properties
윤천, 이혜용, 정윤중, 이경희
J. Korean Ceram. Soc.
1996;33(5):514
Preparation of ATO Thin Films by DC
Magnetron Sputtering
(I) Deposition Characteristics
윤천, 이혜용, 정윤중
J. Korean Ceram. Soc.
1996;33(4):441
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Materials Science, Ceramics - Q1
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