| 증착온도를 달리하여 제조한 Zn0.8Co0.2O 박막의 미세조직 및 자기 특성 |
| 강영훈, 김봉석, 태원필1, 김기출2, 서수정, 박태석, 김용성 |
성균관대학교 정보통신용 신기능성 소재 및 공정연구센터
1울산산업진흥테크노파크 정밀화학센터
2한국전자통신연구소 |
| Microstructure and Magnetic Properties of Pulsed DC Magnetron Sputtered Zn0.8Co0.2O Film Deposited at Various Substrate Temperatures |
| Young-Hun Kang, Bong-Seok Kim, Weon-Pil Tai1, Ki-Chul Kim2, Su-Jeung Suh, Tae-Seok Park, Young-Sung Kim |
Advanced Material Process of Information Technology, Sungkyunkwan University
1Fine Chemical Industry Support Center, Ulsan Industry Promotion Techno Park
2Electronics and Telecommunications Research Institute |
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| ABSTRACT |
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We studied the microstructure and magnetic property of the pulsed DC magnetron sputtered $Zn_{ .8}Co_{0.2}O$ film as a function of substrate temperatures. The X-ray patterns of the $Zn_{ .8}Co_{0.2}O$ film showed a strong (002) preferential orientation at $500^{circ}C$. The films with a crystallite size of 23-35 nm were grown in the form of nano-sized structure and this tendency was remarkable with increasing substrate temperature. The UV-visible result showed that the $Zn_{ .8}Co_{0.2}O$ film prepared above $300^{circ}C$ has a high optical transmittance of over $80%$ in the visible region. The absorption bands were observed due to sp-d interchange action by $Co^{2+}$ complex ion and dd transition in the region from 500 to 700nm. The resistivity of the film was below $10^{-1};Omega-cm;above;300^{circ}C$. The AGM analysis results for the all films showed the magnetic hysteresis curves of ferromagnetic nature. The low electrical resistivity and room temperature ferromagnetism of ZnCoO thin films 'deposited above $300^{circ}C$ suggested the possibility for the application to Diluted Magnetic Semiconductors (DMSs). |
| Key words:
ZnCoO thin films, Pulsed DC magnetron sputtering, Ferromagnetism, Diluted Magnetic Semiconductors (DMSs) |
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