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Journal of the Korean Ceramic Society 2001;38(8): 683. |
| Fabrication of Lithium Nickel Cobaltate Thin-film for the Cathode Material of Microbattery |
| Duksu Kim, Mun-Kyu Kim, Jong-Tae Son1, Ho-Gi Kim |
Department of Materials and Science, Korea Advanced Institute of Science and Technology
1Dong-A Electric Equipment Co. LTD. |
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| ABSTRACT |
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Electrochemically active lithium nickel cobalt oxide thin-film was not fabricated until now. The thin-film was deposited by RF magnetron sputtering at room temperature, and its initial phase was amorphous. By varying deposition condition, the different characteristics of thin-film were achieved. Using electrochemical analyses, the relationship between physical and electrochemical characteristics was identified. Crystallized thin-film by RTA (Rapid Thermal Annealing) was shown a good capacity and cycle property. |
| Key words:
Lithium nickel cobaltate, Microbattery, Cathode, RF magnetron sputtering |
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