| 다이아몬드 지립을 이용한 구조세라믹스의 경면가공 특성 |
| 김유영, 곽태수, 김경년1 |
국립진주산업대학교 기계공학과
1거제대학 기계공학과 |
| Mirror-surface Machining Properties of Structural Ceramics using Diamond Abrasives |
| Yoo-Young Kim, Tae-Soo Kwak, Kyung-Nyun Kim1 |
Department of Mechanical Engineering, JINJU National University
1Department of Mechanical Engineering, KOJE College |
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| ABSTRACT |
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This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system. |
| Key words:
Structural ceramics, Mirror-surface machining, Surface roughness, Ductile mode, Brittle mode |
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