| Effects of Heterostructure Electrodes on the Reliability of Ferroelectric PZT Thin Films |
| Seung-Hyun Kim, Hyun-Jung Woo, Chang-Young Koo, Jeong-Seung Yang, Su-Min Ha, Dong-Yeon Park, Dong-Su Lee, Jo-Woong Ha |
| INOSTEK Inc., Research and Development Center |
|
|
|
|
|
| ABSTRACT |
|
The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties with minimal leakage current. |
| Key words:
Pt, TiN, Pt-IrO$_2$ hybrid electrode, Fatigue, PZT |
|
PDF Links
Full text via DOI
Download Citation 
