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J. Korean Ceram. Soc. > Volume 43(11); 2006 > Article
Journal of the Korean Ceramic Society 2006;43(11): 738.
doi: https://doi.org/10.4191/kcers.2006.43.11.738
Effects of Codoping with Fluorine on the Properties of ZnO Thin Films
Young-Woo Heo, D.P. Norton1
Department of Inorganic Materials Engineering, Kyungpook National University
1Department of Materials Science and Engineering, University of Florida
ABSTRACT
We report on the effects of co-doping with fluorine on properties of ZnO thin films grown by pulsed-laser deposition. The transport characteristics of Ag-F and Li-F codoped ZnO films were determined by Hall-effect measurements at room temperature. Ag-F codoped ZnO films showed n-type semiconducting behaviors. An ambiguous carrier type was observed in Li-F codoped ZnO films grown at a temperature of 500$^{circ}C$ with the oxygen pressures of 20 and 200 mTorr. The qualities of the codoped ZnO films were studied by X-ray diffraction, atomic force microscopy, X-ray photoemission spectroscopy, and photoluminescence.
Key words: ZnO, p-type, Codoping
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