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Journal of the Korean Ceramic Society 1992;29(3): 189. |
Czochralski법에 의한 $LiNbO_3$ 단결정 성장 |
이상학, 윤의박 |
한양대학교 |
The Growth of LiNbO3 Crystals by Czochralski Technique |
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ABSTRACT |
In order to grow a 127.86$^{circ}$rotated LiNbO3 single crystal with good characteristics of surface acoustic wave (SAW) up to 80 mm in diameter, the temperature gradient of furnace, the growth rate and the rotation rate of crystal were changed. We could grow a crystal which had few macro defects at the conditions of temperature gradient as 30~6$0^{circ}C$/cm, growth rate as 5 mm/hr and rotation rate as 8 rpm. The experimental ranges of the growth conditions are as follows. Temperature gradient was varied from 20 to 20$0^{circ}C$/cm, growth rate as 5~7 mm/hr and crystal rotation rate as 6~12rpm. |
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