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Characterization of Deep Dry Etching of Silicon Single Crystal by HDP
박우정, 김장현, 김용탁, 백형기, 서수정, 윤대호
J. Korean Ceram. Soc.
2002;39(6):570
DOI:
https://doi.org/10.4191/kcers.2002.39.6.570
Cited By 1
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5