Characterization of Deep Dry Etching of Silicon Single Crystal by HDP
, , , , ,
J. Korean Ceram. Soc. 2002;39(6):570 DOI: https://doi.org/10.4191/kcers.2002.39.6.570
|
Citations to this article as recorded by
Parameter study for silicon grass formation in Bosch process
KyuBong Jung, WooJin Song, Hyun Woo Lim, Caroline Sunyong Lee
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena.2010; 28(1): 143. CrossRef
|