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J. Korean Ceram. Soc. > Volume 57(2); 2020 > Article
Journal of the Korean Ceramic Society 2020;57(2): 206-212.
doi: https://doi.org/10.1007/s43207-020-00019-y
Crack‑free TiO2 films prepared by adjusting processing parameters via liquid phase deposition technique
Jie Li1 , Hai‑Yan Xu1,2, Ai‑Guo Wang1, Feng‑Jun Zhang1,2, Dao‑Sheng Sun1, Won‑Chun Oh3
1Anhui Key Laboratory of Advanced Building Materials, Anhui Jianzhu University, Hefei, Anhui 230022, People’s Republic of China
2Key Laboratory of Functional Molecule Design and Interface Process, Anhui Jianzhu University, Hefei, Anhui 230601, People’s Republic of China
3Department of Advanced Materials Science and Engineering, Hanseo University, Seosan 31962, Korea
Correspondence  Hai‑Yan Xu ,Email: xuhaiyan@ahjzu.edu.cn
Won‑Chun Oh ,Email: wc_oh@hanseo.ac.kr
Received: October 30, 2019; Revised: November 25, 2019   Accepted: December 9, 2019.  Published online: February 29, 2020.
TiO2 thin films with controllable morphology and grain size were prepared via a liquid phase deposition (LPD) technique. The effects of the processing parameters including the ( NH4)2TiF6 concentration, solution pH, and ( NH4)2TiF6:H3BO3 molar ratio on the grain size and morphology of the films were investigated. The prepared samples were characterized by X-ray diffraction, scanning electron microscopy, and ultraviolet–visible spectroscopy. The results showed that the deposition parameters significantly affected the growth and nucleation velocities of the crystalline grains, which resulted in the formation of TiO2 films with different morphologies and grain sizes. The capillary stress among the grains of the film, which resulted in the cracking of the film, depended on the size of the grains. Thus, the cracking of the LPD-derived TiO2 films could be mitigated by adjusting the deposition parameters.
Key words: TiO2 thin film · Morphology control · Size control · Crack-free
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