| 제조 공정별 대형 알루미나 세라믹스의 전기적 특성 |
| 조경식, 이현권, 박용일, 김미영1 |
금오공과대학교 신소재시스템공학부
1(주)원익쿼츠 |
| Electrical Properties of Large Alumina Ceramics Prepared by Various Processing |
| Kyeong-Sik Cho, Hyun-Kwuon Lee, Young-Il Park, Mi-Young Kim1 |
School of Advanced Materials and System Engineering, Kumoh National Institute of Technology
1Wonik Quartz Co. |
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| ABSTRACT |
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The size of various alumina ceramics used in semiconductor and display industry is required to increase with increase in wafer and panel size. In this research, large alumina ceramics were fabricated by uniaxial pressing, cold isostatic pressing and filter pressing with commercial powder and thereafter sintering at $1600^{circ}C$ in gas furnace. The large alumina ceramics exhibited dense microstructure corresponding to 98.5% of theoretical density and 99.8% of high purity. The impurities and microstructural defects of the alumina were found to influence the resistance and dielectric properties. The volume resistances in these four aluminas were almost the same while the pure alumina was higher value. The dielectric constant, dielectric loss and dielectric strength of aluminas were placed within the range of 10.3~11.5, 0.018~0.036, and 10.1~12.4 kV/mm, respectively. |
| Key words:
Alumina, Dielectric constant, Dielectric loss, Dielectric strength, Volume resistance |
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