| Sol-gel법으로 제조한 강유전성 Bi3.25La0.75Ti3O12박막의 급속열처리에 따른 전기적 특성에 관한 연구 |
| 이인재, 김병호 |
| 고려대학교 재료공학과 |
| A Study on Electrical Properties of Sol-gel Derived Bi3.25La0.75Ti3O12 Thin Films by Rapid Thermal Annealing |
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| ABSTRACT |
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Ferroelectric B $i_{3.25}$L $a_{0.75}$ $Ti_3$ $O_{12}$ (BLT) solution was synthesized by sol-gel process. BLT thin films were deposited on Pt/Ti $O_2$/ $SiO_2$/Si substrates by spin-coating. In this experiments, Bi(TMHD)$_3$, La(III)2-Methoxyethoxide, and Ti(IV) i-propoxide were used as starting materials, which were dissolved in 2-Methoxyethanol. Rapid Thermal Annealing (RTA) was used to promote crystallization of BLT thin films. The thin films with RTA process were compared with those with non-RTA process on electrical properties. After RTA process, the remanent polarization value (2Pr) of BLT thin films annealed at 72$0^{circ}C$ was 20.46 $mu$C/$textrm{cm}^2$ which was approximately 27% higher than that of non-RTA process at 5 V.5 V. |
| Key words:
Sol-gel process, RTA, BLT thin film, Ferroelectric |
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