The Characteristics of Pyrolytic Carbon Deposited in a Fluidized Bed by CVD

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J. Korean Ceram. Soc. > Volume 21(2); 1984 > Article

Journal of the Korean Ceramic Society 1984;21(2): 156.

Fluidized Bed에서 화학증착법에 의해 증착된 열분해 탄소의 특성

승성표, 이재영, 진억용¹

한국과학기술원 재료공학과
¹아주대학교 재료공학과

The Characteristics of Pyrolytic Carbon Deposited in a Fluidized Bed by CVD

ABSTRACT

The characteristic of pyrolytic carbon deposited in a fluidized bed as measured by density apparent crystallite size and viewed metallographically under polarized light can be easily controlled by adjusting the deposition parameters such as deposition temperature and propane flow rate or silicon content. The density of isotopic pyrolytic carbons deposited from propane between 120$0^{circ}C$ and 140$0^{circ}C$ increases with increasing propane flow rate and decreasing deposition temperature from 1, 73g/cc to 2.08g/cc. The apparent crystallite size Lc parameter appears to depend only on deposition temperature being entirely independent of the propane flow rate. The carbon matrix density of the silicon-alloyed carbonds deposited from propane and methyltrichlorosil-ane from 2.05g/cc for a silicon content around 9wt% to 2.67g/cc for a silicon content of 36.7wt% The Lc parameter of the deposition temperature being entirely independent of the silicon content.