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Journal of the Korean Ceramic Society
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Optical Properties and Structural Analysis of SiO
2
Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition
Sung-Min Cho, Yong-Tak Kim, Yong-Gon Seo, Hyung-Do Yoon, Young-Min Im, Dae-Ho Yoon
J. Korean Ceram. Soc.
2002;39(5):479
DOI:
https://doi.org/10.4191/kcers.2002.39.5.479
Cited By 1
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5