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Generation of Low Temperature Plasma at Atmospheric Pressure and its Application to Si Etching in Open Air
Bong-Ju Lee
J. Korean Ceram. Soc.
2002;39(4):409
DOI:
https://doi.org/10.4191/kcers.2002.39.4.409
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5