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J. Korean Ceram. Soc. > Volume 35(11); 1998 > Article
Journal of the Korean Ceramic Society 1998;35(11): 1222-1226.
고온 열처리에 따른 Y₂O₃박막과 (100) 실리콘 기판간의 계면 반응에 관한 연구
황정남, 강성관, 김은하, 고대호, 조만호
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