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J. Korean Ceram. Soc. > Volume 51(5); 2014 > Article
Journal of the Korean Ceramic Society 2014;51(5): 447.
doi: https://doi.org/10.4191/kcers.2014.51.5.447
듀티 싸이클 및 펄스 주파수가 TiAlN 코팅막의 미세구조와 기계적 특성에 미치는 영향에 관한 연구
전성용, 황주연
목포대학교 신소재공학과
Effects of Duty Cycle and Pulse Frequency on the Microstructure and Mechanical Properties of TiAlN Coatings
Sung-Yong Chun, Ju Yeon Hwang
Department of Advanced Materials Science and Engineering, Mokpo National University
ABSTRACT
This paper presents the effects of pulse plasma parameters such as duty cycle and pulse frequency on the properties of TiAlN coatings deposited by asymmetric bipolar pulsed DC magnetron sputtering systems. The results show that, with decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar structure to a dense structure with finer grains. Pulsed sputtered TiAlN coatings showed higher hardness, higher residual stress, and smaller grain sizes than did DC prepared TiAlN coatings. Moreover, residual stress and nanoindentation hardness of pulsed sputtered TiAlN coatings increased with increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.
Key words: Asymmetric bipolar, Duty cycle, Pulse frequency, Nanoindentation, Surface morphology
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