| pH 조건에 따른 기공성 실리콘의 나노구조 및 광학적 특성의 변화 |
| 김효한, 조남희 |
| 인하대학교 신소재공학부 |
| Variation of the Nanostructural and Optical Features of Porous Silicon with pH Conditions |
| Hyo-Han Kim, Nam-Hee Cho |
| Department of Materials Science and Engineering, Inha University |
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| ABSTRACT |
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The effect of chemical treatments of porous silicon in organic solvents on its nanostructural and optical features was investigated. When the porous Si was dipped in the organic solvent with various PH values, the morphological, chemical, and structural properties of the porous silicon was sensitively affected by the chemical conditions of the solvents. The size of silicon nanocrystallites in the porous silicon decreased from 5.4 to 3.1 nm with increasing pH values from 1 to 14. After the samples were dipped in the organic solvents, the Si-O-H bonding intensity was increased while that of Si-H bonding decreased. Photoluminescence peaks shifted to a shorter wavelength region in the range of 583 to 735 nm as the pH value increased. PL intensity was affected by the size as well as the volume fraction of the nanocrystalline silicon in the porous silicon. |
| Key words:
Porous silicon, Electrochemical etching, Photoluminescence, Oxidation, Nanocrystalline silicon |
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