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J. Korean Ceram. Soc. > Volume 49(6); 2012 > Article
Journal of the Korean Ceramic Society 2012;49(6): 523.
doi: https://doi.org/10.4191/kcers.2012.49.6.523
RF 유도 열플라즈마를 이용한 유기 용매로 부터의 탄화규소 나노 분말 합성
고상민, 구상만1, 김진호, 조우석, 황광택
한국세라믹기술원 이천분원
1한양대학교 화학공학과
Synthesis of Silicon Carbide Nano-Powder from a Silicon-Organic Precursor by RF Inductive Thermal Plasma
Sang-Min Ko, Sang-Man Koo1, Jin-Ho Kim, Woo-Seok Cho, Kwang-Taek Hwang
Korea Institute of Ceramic Engineering and Technology
1Department of Chemical Engineering, Hanyang University
ABSTRACT
Silicon carbide (SiC) has recently drawn an enormous amount of industrial interest due to its useful mechanical properties, such as its thermal resistance, abrasion resistance and thermal conductivity at high temperatures. In this study, RF thermal plasma (PL-35 Induction Plasma, Tekna CO., Canada) was utilized for the synthesis of high-purity SiC powder from an organic precursor (hexamethyldisilazane, vinyltrimethoxysilane). It was found that the SiC powders obtained by the RF thermal plasma treatment included free carbon and amorphous silica ($SiO_2$). The SiC powders were further purified by a thermal treatment and a HF treatment, resulting in high-purity SiC nano-powder. The particle diameter of the synthesized SiC powder was less than 30 nm. Detailed properties of the microstructure, phase composition, and free carbon content were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), a thermogravimetric (TG) analysis, according to the and Brunauer-Emmett-Teller (BET) specific surface area from N2 isotherms at 77 K.
Key words: RF thermal plasma, SiC, Nano powder synthesis, Organic precursor
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