| Electrical Properties of Eco-Friendly RuO2-Based Thick-Film Resistors Containing CaO-ZnO-B2O3-Al2O3-SiO2 계 유리가 적용된 질화알루미늄 기판용 RuO2계 친환경 후막저항의 전기적 특성 연구 |
| 김민식, 김형준, 김형태, 김동진1, 김영도2, 류성수 |
한국세라믹기술원 엔지니어링세라믹센터
1케이엠씨테크놀러지
2한양대학교 신소재공학부 |
| Electrical Properties of Eco-Friendly RuO2-Based Thick-Film Resistors Containing CaO-ZnO-B2O3-Al2O3-SiO2 System Glass for AlN Substrate |
| Min-Sik Kim, Hyeong-Jun Kim, Hyung-Tae Kim, Dong-Jin Kim1, Young-Do Kim2, Sung-Soo Ryu |
Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
1KMC Technology
2Materials Science & Engineering, Hanyang University |
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| ABSTRACT |
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The objective of this study is to prepare lead-free thick film resistor (TFR) paste compatible with AlN substrate for hybrid microelectronics. For this purpose, CaO-ZnO-$B_2O_3-Al_2O_3-SiO_2$ glass system was chosen as a sintering aid of $RuO_2$. The effects of the weight ratio of CaO to ZnO in glass composition, the glass content and the sintering temperature on the electrical properties of TFR were investigated. $RuO_2$ as a conductive and glass powder were dispersed in an organic binder to obtain printable paste and then thick-film was formed by screen printing, followed by sintering at the range between $750^{circ}C$ and $900^{circ}C$ for 10 min with a heating rate of $50^{circ}C$/min in an ambient atmosphere. The addition of ZnO to glass composition and sintering at higher temperature resulted in increasing sheet resistance and decreasing temperature coefficient of resistance. Using $RuO_2$-based resistor paste containing 40 wt%glass of CaO-20.5%ZnO-25%$B_2O_3$-7%$Al_2O_3$-15%$SiO_2$ composition, it is possible to produce thick film resistor on AlN substrate with sheet resistance of $10.6Omega/spuare$ and the temperature coefficient of resistance of 702ppm/$^{circ}C$ after sintering at $850^{circ}C$. |
| Key words:
Thick film resistor, $RuO_2$, AlN, Lead-free, CaO-ZnO-$B_2O_3-Al_2O_3-SiO_2$ glass |
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