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J. Korean Ceram. Soc. > Volume 46(6); 2009 > Article
Journal of the Korean Ceramic Society 2009;46(6): 708.
doi: https://doi.org/10.4191/kcers.2009.46.6.708
Indium Tin Oxide (ITO) Coatings Fabricated Using Mixed ITO Sols
Deock-Soo Cheong, Dong-Hun Yun1, Sang-Hwan Park1, Chang-Sam Kim2
Department of MATSE, Dankook University
1Division of MATSE, Korea Institute of Science and Technology
2Battery Research Center, Korea Institute of Science and Technology
ABSTRACT
ITO films were achieved by sintering at $500{sim}550{^{circ}C}$. This was possible by inducing a seeding effect on an ITO sol by producing crystalline ITO nanoparticles in situ during heat treatment. Two kinds of ITO sols (named ITO-A and ITO-B) were prepared at 2.0 wt% from indium acetate and tin(IV) chloride in different mixed solvents. The ITO-A sol showed a high degree of crystallinity of ITO without any detectable Sn$O_2$ on XRD at $350{^{circ}C}$/1 h, but the ITO-B sol showed a small amount of Sn$O_2$ even after annealing at $600{^{circ}C}$/1 h. The 10 wt% ITO-A//ITO-B showed the sheet resistance of 3600$Omega$/□, while the ITO-B sol alone showed 5200 $Omega$/□ by sintering at $550{^{circ}C}$ for 30 min. Processing parameters were studied by TG/DSC, XRD, SEM, sheet resistance, and visible transmittance.
Key words: ITO thin film, Sol-gel coating, Solvent effect, In situ seeding, Mixed sol
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