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J. Korean Ceram. Soc. > Volume 46(5); 2009 > Article
Journal of the Korean Ceramic Society 2009;46(5): 497.
doi: https://doi.org/10.4191/kcers.2009.46.5.497
증착방법에 따른 DLC 막의 마찰-마모 특성평가
오윤석
한국세라믹기술원 이천분원 엔지니어링세라믹센터
Characterization of Tribological Properties of DLC Films Prepared by Different Deposition Method
Yoon-Suk Oh
Korea Institute of Ceramic Engineering and Technology
ABSTRACT
DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. Different deposition method such as arc plating, ion gun plating and PECVD were used for comparing mechanical and tribological properties of each DLCs deposited on stainless steel with 1 um thick respectively. Among these 3 types of DLCs, the arc plated DLC film showed highest value for wear resistance in dry condition. From the results of analysis for physical properties of DLC films, it seems that the adhesion force and crack initiation modes were more important factors than intrinsic mechanical properties such as hardness, elastic modulus and/or roughness to the wear resistance of DLC films. Raman spectroscopy was used for understanding chemical bonding natures of each type of DLC films. Typical D and G peaks were identified based on the deposition method. Hardness of the coating layers were identified by nanoindentation method and the adhesions were checked by scratch method.
Key words: DLC, Arc evaporation, Ion gun plating, PECVD, Adhesion
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