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J. Korean Ceram. Soc. > Volume 46(5); 2009 > Article
Journal of the Korean Ceramic Society 2009;46(5): 441.
doi: https://doi.org/10.4191/kcers.2009.46.5.441
에어로졸 데포지션에 의한 이트리아 필름의 미세구조와 특성
이병국, 박동수, 윤운하, 류정호, 한병동, 최종진
재료연구소 기능재료연구본부 기능세라믹그룹
Microstructure and Properties of Yttria Film Prepared by Aerosol Deposition
Byung-Kuk Lee, Dong-Soo Park, Woon-Ha Yoon, Jung-Ho Ryu, Byung-Dong Hahn, Jong-Jin Choi
Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science
Dense crack-free yttria film with 10 $mu m$ thickness was prepared on aluminum by aerosol deposition. X-ray diffraction pattern on the film showed that it contained the same crystalline phase as the raw powder. Transmission electron microscopy revealed a nanostructured yttria film with grains smaller than 100 nm. Tensile adhesion strength between the film and aluminum substrate was 57.8 $pm$ 6.3MPa. According to the etching test with $CF_4-O_2$ plasma, the etching rate of the yttria film was 1/100 that of quartz, 1/10 that of sintered alumina and comparable to that of sintered yttria.
Key words: Microstructure, Corrosion resistance, Thick film, Adhesion
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