| 내플라즈마성 알루미나 세라믹스 제조 공정 |
| 이현권, 조경식, 김미영1 |
금오공과대학교 신소재시스템공학부
1(주)원익쿼츠 세라믹스사업부 |
| Processing of Plasma Resistant Alumina Ceramics |
| Hyun-Kwuon Lee, Kyeong-Sik Cho, Mi-Young Kim1 |
School of Advanced Materials and System Engineering, Kumoh National Institute of Technology
1Ceramics Division, Wonik Quartz Co. |
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| ABSTRACT |
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Need for plasma resistant ceramic materials has been continuously increased in semiconductor and display industry requiring plasma processing to realize ultra fine circuit process. Among promising candidates, alumina ceramics have still some advantages with respect to its economic aspect. In this study, fabrication of plasma resistant alumina ceramics was tried, and its processing optimization was also aimed. Careful processing control and thereby uniform microstructure of $Al_2O_3$ gave rise to enhanced plasma resistance, even comparable to market-governing commercial $Al_2O_3$. A further study is needed concerning ${beta}-Al_2O_3$ materials system, presumably playing a decisive role in decreasing plasma resistance of $Al_2O_3$ ceramics. |
| Key words:
Alumina, Plasma resistant, Powder processing, Microstructure |
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