| Y2O3 첨가가 AlN 세라믹스의 방전 플라즈마 소결 거동 및 열전도도에 미치는 영향 |
| 차재홍, 박주석, 안종필, 김경훈, 이병하 |
| 요업기술원 |
| Effects of Y2O3 Addition on Densification and Thermal Conductivity of AlN Ceramics During Spark Plasma Sintering |
| Jae-Hong Chae, Joo-Seok Park, Jong-Pil Ahn, Kyoung-Hun Kim, Byung-Ha Lee |
| Korea Institute of Ceramic Engineering and Technology |
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| ABSTRACT |
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Spark plasma sintering (SPS) of AlN ceramics were carried out with ${Y_2}{O_3}$ as sintering additive at a sintering temperature $1,550{sim}1,700^{circ}C$. The effect of ${Y_2}{O_3}$ addition on sintering behavior and thermal conductivity of AlN ceramics was studied. ${Y_2}{O_3}$ added AlN showed higher densification rate than pure AlN noticeably, but the formation of yttrium aluminates phases by the solid-state reaction of ${Y_2}{O_3}$ and ${Al_2}{O_3}$ existed on AlN surface could delay the densification during the sintering process. The thermal conductivity of AlN specimens was promoted by the addition of ${Y_2}{O_3}$ up to 3 wt% in spite of the formation of YAG secondary phase in AlN grain boundaries because ${Y_2}{O_3}$ addition could reduced the oxygen contents in AlN lattice which is primary factor of thermal conductivity. However, the thermal conductivity rather decreased over 3 wt% addition because an immoderate formation of YAG phases in grain boundary could decrease thermal conductivity by a phonon scattering surpassing the contribution of ${Y_2}{O_3}$ addition. |
| Key words:
Aluminum nitride, Ytrria, Thermal conductivity, Sintering |
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