| 후막리소그라피를 이용한 세라믹기반의 미세유체소자용 수동형 혼합기의 제조 |
| 최재경, 윤영준, 임종우, 김효태, 구은회, 최윤석1, 이종흔2, 김종희 |
요업기술원 융복합기술본부 융합기술팀
1(주)경원테크
2고려대학교 신소재공학과 |
| Fabrication of Ceramic-based Passive Mixers for Microfluidic Application by Thick Film Lithography |
| Jae-Kyung Choi, Young-Joon Yoon, Jong-Woo Lim, Hyo-Tae Kim, Eun-Hae Koo, Youn-Suk Choi1, Jong-Heun Lee2, Jong-Hee Kim |
Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology
1Kyungwon Tech Inc.
2Department of Materials Science & Engineering, Korea University |
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| ABSTRACT |
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Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite $((Mg,Ca)_2Al_4Si_5O_{18})$ and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and $200{mu}m$, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail. |
| Key words:
Ceramic passive mixer, Cordierite, Photoimageable paste, Photolithography, Microfluidics |
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