| 화학증착법에 의하여 제조된 탄화지르코늄 코팅층의 물성 |
| 김준규, 금이슬, 최두진, 이영우1, 박지연1 |
연세대학교 신소재공학과
1한국원자력연구소 원자력수소생산사업팀 |
| Properties of Chemical Vapor Deposited ZrC coating layer for TRISO Coated Fuel Particle |
| Jun-Gyu Kim, E-Sul Kum, Doo-Jin Choi, Young-Woo Lee1, Ji-Yeon Park1 |
Department of Advanced Material Science and Engineering, Yonsei University
1Nuclear Materials Technology and Development, Korea Atomic Energy Research Institute |
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| ABSTRACT |
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The ZrC layer instead of SiC layer is a critical and essential layer in TRISO coated fuel particles since it is a protective layer against diffusion of fission products and provides mechanical strength for the fuel particle. In this study, we carried out computational simulation before actual experiment. With these simulation results, Zirconium carbide (ZrC) films were chemically vapor deposited on $ZrO_2$ substrate using zirconium tetrachloride $(ZrCl_4),;CH_4$ as a source and $H_2$ dilution gas, respectively. The change of input gas ratio was correlated with growth rate and morphology of deposited ZrC films. The growth rate of ZrC films increased as the input gas ratio decreased. The microstructure of ZrC films was changed with input gas ratio; small granular type grain structure was exhibited at the low input gas ratio. Angular type structure of increased grain size was observed at the high input gas ratio. |
| Key words:
TRISO, ZrC, CVD, Input gas ratio, Morphology |
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