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J. Korean Ceram. Soc. > Volume 44(6); 2007 > Article
Journal of the Korean Ceramic Society 2007;44(6): 303.
doi: https://doi.org/10.4191/kcers.2007.44.6.303
In 도핑된 ZnO 박막의 투명 전극과 유기 발광 다이오드 특성
박영란, 김용성1
성균관대학교 물리학과 기능성나노신소재연구소
1성균관대학교 정보통신용 신기능성 소재 및 공정연구센터
Transparent Anodic Properties of In-doped ZnO thin Films for Organic Light Emitting Devices
Young-Ran Park, Young-Sung Kim1
Department of Physics, Institute of Basic Science and Center for nanotubes and nanocomposites, Sungkyunkwan University
1Advanced Material Process of Information Technology, Sungkyunkwan University
ABSTRACT
Transparent In-doped zinc oxide (IZO) thin films are deposited with variation of pulsed DC power at Ar atmosphere on coming 7059 glass substrate by pulsed DC magnetron sputtering. A c-axis oriented IZO thin films were grown in perpendicular to the substrate. The optical transmittance spectra showed high transmittance of over 80% in the UV-visible region and exhibited the absorption edge of about 350 nm. Also, the IZO films exhibited the resistivity of ${sim}10^{-3}{Omega};cm$ and the mobility of ${sim}6cm/V;s$. Organic Light-emitting diodes (OLEDs) with IZO/N,N'-diphenyl-N, N'-bis(3-methylphenl)-1, 1'-biphenyl-4,4'-diamine (TPD)/tris (8-hydroxyquinoline) aluminum ($Alq_3$)/LiF/Al configuration were fabricated. LiF layer inserted is used as an interfacial layer to increase the electron injection. Under a current density of $100;mA/cm^2$, the OLEDs show an excellent efficiency (9.4 V turn-on voltage) and a good brightness ($12000;cd/m^2$) of the emission light from the devices. These results indicate that IZO films hold promise for anode electrodes in the OLEDs application.
Key words: ZnO, Thin film, Anode, Organic light emitting devices, OLED
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