| Fabrication of PZT Tubular Structures by a Template-wetting Process |
| U.A. Shaislamov, S.K. Hong1, B. Yang |
Department of Materials Science and Engineering Kumoh National Institute of Technology
1Hynix Semiconductor Inc., Memory R&D Division, New Device Team |
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| ABSTRACT |
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Nanotubes and microtubes of ferroelectric lead zirconate titanate (PZT) were synthesized by means of a simple and convenient process called a template-wetting process. Nanoporous alumina and macroporous Si were used as template materials to fabricate the corresponding tubes. For the improvement of the wetting properties of the wetting solution, the PZT solution was mixed with a polymer. The polymer was removed completely during annealing. The grain growth processes of the PZT nanotubes during baking and furnace annealing were examined by means of field emission electron microscope (FE-SEM) and X-ray diffractometry (XRD). |
| Key words:
PZT, Nanotube, AAO template, Ferroelectric, Template-wetting |
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