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J. Korean Ceram. Soc. > Volume 43(4); 2006 > Article
Journal of the Korean Ceramic Society 2006;43(4): 220.
doi: https://doi.org/10.4191/kcers.2006.43.4.220
3D Nanotube Capacitor 구현을 위한 BLT Nanotube 제작
서보익, Shaislamov Ulugbek1, 김상우, 홍석경2, 양비룡
금오공과대학교 금속공학부
2하이닉스 반도체
Fabrication of BLT Nanotubes for 3D Nanotube Capacitor
Bo-Ik Seo, Shaislamov Ulugbek 1, Sang-Woo Kim, Seok-Kyung Hong2, Bee-Lyong Yang
Department of Materials Science and Engineering, Kumoh National Institute of Technology
1Department of Materials Science and Engineering, Kumoh National Institute of Technology
2Hynix Semiconductor Inc., Memory R&D Division, New Device Team
BLT nanotubes were synthesized by using simple and convenient method template-wetting process. Porous alumina membranes were prepared by 2 step anodic oxidation as the template. To improve wetting properties and make low surface energy, BLT solution was mixed with polymer. Polymer was removed completely during annealing. After completely etching the template in 30 wt% KOH solution, we demonstrate that BLT nanotubes with a diameter of 200 nm can be fabricated. Grain growth process of BLT nanotubes during baking, and furnace annealing was examined by FE-SEM and XRD.
Key words: BLT, AAO, Nanotube, Template, Polymer
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