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J. Korean Ceram. Soc. > Volume 43(3); 2006 > Article
Journal of the Korean Ceramic Society 2006;43(3): 143.
doi: https://doi.org/10.4191/kcers.2006.43.3.143
Nano-Granular Co-Fe-AI-O Soft Ferromagnetic Thin Films for GHz Magnetic Device Applications
Jae-Cheon Sohn, Dong-Jin Byun1
Future Technology Research Division, Korea Institute of Science and Technology
1Department of Materials Science and Engineering, Korea University
ABSTRACT
Co-Fe-Al-O nanogranular thin films were fabricated by RF-magnetron sputtering under an $Ar+O_2$ atmosphere. High resolution transmission electron microscopy revealed that the Co-Fe-Al-O films are composed of bcc (Co, Fe) nanograins finer than 5 nm and an Al-O amorphous phase. A very large electrical resistivity of $374{mu}{Omega}cm$ was obtained, together with a large uniaxial anisotropy field of 50 Oe, a hard axis coercivity of 1.25 Oe, and a saturation magnetization of 12.9 kG. The actual part of the relative permeability was measured to be 260 at low frequencies and this value was maintained up to 1.3 GHz. The ferromagnetic resonance frequency was 2.24 GHz. The resulting Co-Fe-Al-O nanogranular thin films with a high electrical resistivity and high resonance frequency are considered to be suitable for GHz magnetic device applications.
Key words: Nano-granular thin film, Soft ferromagnetic, Ferromagnetic resonance
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