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J. Korean Ceram. Soc. > Volume 43(3); 2006 > Article
Journal of the Korean Ceramic Society 2006;43(3): 185.
doi: https://doi.org/10.4191/kcers.2006.43.3.185
PES 필름상에 스퍼터링한 ITO 박막의 열처리에 따른 결정화 거동 및 전기적 특성 변화
소병수, 김영환
홍익대학교 금속 재료공학과
Effects of Post-Annealing on Crystallization and Electrical Behaviors of ITO Thin Films Sputtered on PES Substrates
Byung-Soo So, Young-Hwan Kim
Department of Materials Science and Engineering, Hongik University
The effects of annealing on structural and electrical properties of ITO/PES (Indium Tin Oxide/Polyethersulfone) films was investigated. Amorphous ITO thin films were grown on plastic substrates, PES using low temperature DC magnetron sputtering. Various post annealing techniques were attempted to research variations of microstructure and electrical properties: i) conventional thermal annealing, ii) excimer laser annealing, iii) UV irradiation. The electrical properties were obtained using Hall effect measurements and DC 4-point resistance measurement. The microstructural features were characterized by FESEM, XRD, Raman spectroscopy in terms of morphology and crystallinity. Optimized UV treatment exhibits the enhanced conductivity and crystallinity, compared to those of conventional thermal annealing.
Key words: ITO(Indium-Tin Oxide), PES, UV irradiation, Crystallization, Electrical properties
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