| ReMnO3(Re:Ho, Er) 박막의 강유전성에 미치는 열처리 공정의 영향 |
| 김응수, 채정훈 |
| 경기대학교 재료공학과 |
| Effects of Thermal Heat Treatment Process on the Ferroelectric Properties of ReMnO3 (Re:Ho, Er) Thin Films |
| Eung Soo Kim, Jung-Hoon Chae |
| Department of Materials Engineering, Kyonggi University |
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| ABSTRACT |
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Ferroelectric $ReMnO_3$(Re:Ho, Er) thin films were deposited on Si(100) substrate by Metal-Organic Chemical Vapor Deposition (MOCVD). Crystallinity and electric properties of $ReMnO_3$(Re:Ho, Er) thin films were investigated as a function of thermal heat treatment process, CHP (Conventional Heat-treatment Process) and RTP (Rapid Thermal Process). $ReMnO_3$(Re:Ho, Er) thin films prepared by RTP showed higher c-axis preferred orientation and homogeneous surface roughness than those prepared by CHP. The remnant polarization of ferroelectric hysteresis loop of $ReMnO_3$(Re:Ho, Er) thin films was strongly dependent on the c |
| Key words:
Heat treatment process, Ferroelectric properties, c-axis preferred orientation, Metal-Organic Chemical Vapor Deposition (MOCVD) |
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