Fabrication of a (100) Silicon Master Using Anisotropic Wet Etching for Embossing

Journal of the Korean Ceramic Society 2005;42(10): 645.
doi: https://doi.org/10.4191/kcers.2005.42.10.645

Department of Materials Engineering Korea University of technology and Education

ABSTRACT

To fabricate a (100) silicon hard master, we used anisotropic wet etching for the embossing. The etching chemical for the sili

Key words: Silicon master, Anisotropic wet etching, Embossing, Surface roughness