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J. Korean Ceram. Soc. > Volume 42(5); 2005 > Article
Journal of the Korean Ceramic Society 2005;42(5): 326.
doi: https://doi.org/10.4191/kcers.2005.42.5.326
Ge2Sb2Te5 박막의 상변화에 의한 기계적 물성 변화
홍성덕, 정성민, 김성순, 이홍림
연세대학교 세라믹공학과
Phase Transformation Effect on Mechanical Properties of Ge2Sb2Te5 Thin Film
Sung-Duk Hong, Seong-Min Jeong, Sung-Soon Kim, Hong-Lim Lee
Department of Ceramic Engineering, Yonsei University
Phase transformation effects on mechanical properties of $Ge_2Sb_2Te_5$, which is a promising candidate material for Phase Change Random Access Memory (PRAM), were studied. $Ge_2Sb_2Te_5$ thin films, which was thermally annealed with different conditions, were analyzed using XRD, AFM, 4-point probe method and reflectance measurement. As the temperature and the dwelling time increased, crystallity and grain size increased, which enhanced elastic modulus and hardness. Furthermore, N2 doping, which was used for better electrical properties, was proved to decrease elastic modulus and hardness of $Ge_2Sb_2Te_5$.
Key words: PRAM, Phase transformation, Elastic modulus, Hardness, Annealing
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