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J. Korean Ceram. Soc. > Volume 42(3); 2005 > Article
Journal of the Korean Ceramic Society 2005;42(3): 211.
doi: https://doi.org/10.4191/kcers.2005.42.3.211
펄스 DC 마그네트론 스퍼터링법에 의한 Zn1-xCoxO 박막의 미세조직 및 자기적 특성
고윤덕, 고석배, 최문순, 태원필1, 김기출2, 김종민3, 서수정, 김용성
성균관대학교 정보통신용 신기능성 소재 및 공정연구센터
1인하대학교 소재 연구소
3(주) 아프로 R&D
Microstructure and Magnetic Properties of Zn1-xCoxO Film Prepared by Pulsed DC Magnetron Sputtering
Yoon-Duk Ko, Seok-Bae Ko, Moon-Soon Choi, Weon-Pil Tai1, Ki-Chul Kim2, Jong-Min Kim3, Su-Jeung Soh, Young-Sung Kim
Advanced Material Process of Information Technology, Sungkyunkwan University
1Institute of Advanced Materials, Inha University
2Electronics and Telecommunications Research Institute
3APRO Co. Ltd.
[ $Zn_{1-x}Co_{x}O$ (x=0-0.3) films were grown on Corning 7059 glasses by asymmetrical bipolar pulsed dc magnetron sputtering. The c-axis orientation along (002) plane was enhanced with increasing Co concentration. The $Zn_{1-x}Co_{x}O$ films are grown with fibrous grains of tight dome shape. The transmittance spectra measured from UV-visible showed that sp-d exchange interactions and typical d-d transitions become activated with increasing Co concentration. The electrical resistivity of $Zn_{1-x}Co_{x}O$ films increased with increasing Co concentration, especially it increased greatly at $30at% Co. X-ray photoelectron spectroscopy and alternating gradient magnetometer analyses indicated that no Co metal cluster is formed and the ferromagnetic properties are exhibited. The low electrical resistivity and room temperature ferromagnetism of $Zn_{1-x}Co_{x}O$ thin films suggested the possibility of the application to Diluted Magnetic Semiconductors (DMSs).
Key words: DC magnetron sputtering, Ferromagnetism, Ferromagnetism
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