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J. Korean Ceram. Soc. > Volume 41(8); 2004 > Article
Journal of the Korean Ceramic Society 2004;41(8): 593.
doi: https://doi.org/10.4191/kcers.2004.41.8.593
전고상 리튬 박막 전지 구현을 위해 펄스 레이저 증착법으로 LiCoO2 정극위에 성장시킨 비정질 (Li, La)TiO3고체 전해질의 특성
안준구, 윤순길
충남대학교 재료공학과
Amorphous Lithium Lanthanum Titanate Solid Electrolyte Grown on LiCoO2 Cathode by Pulsed Laser Deposition for All-Solid-State Lithium Thin Film Microbattery
To make the all-solid-state lithium thin film battery having less than 1 fm in thickness, LiCoO$_2$ thin films were deposited on Pt/TiO$_2$/SiO$_2$/Si substrate as a function of Li/Co mole ratio and the deposition temperature by Pulsed Laser Deposition (PLD). Especially, LiCoO$_2$ thin films deposited at 50$0^{circ}C$ with target of Li/Co=1.2 mole ratio show an initial discharge capacity of 53 $mu$Ah/cm$^2$-$mu$m and capacity retention of 67.6%. The microstructural and electrochemical properies of (Li, La)TiO3 thin films grown on LiCoO$_2$Pt/TiO$_2$/SiO$_2$/Si structures by Pulsed Laser Deposition (PLD) were investigated at various deposition temperatures. The thin films grown at 10$0^{circ}C$ show an initial discharge capacity of approximately 51 $mu$Ah/cm$^2$-$mu$m and moreover show excellent discharge capacity retention of 90% after 100 cycles. An amorphous (Li, La)TiO$_3$ solid electrolyte is possible for application to solid electrolyte for all-solid-state lithium thin film battery below 1 $mu$m.
Key words: Pulsed laser deposition, (Li, La)$TiO_3$, solid electrolyte, $LiCoO_2$ cathode, Capacity retention, All-solid-state lithium thin film battery
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