| 화학증착 탄화규소 휘스커에 의한 다공성 알루미나 필터의 기공구조 개질 및 특성 평가 |
| 박원순, 최두진1, 김해두2 |
연세대학교 세라믹공학과
1연세대학교 세라믹공학
2한국기계연구원 세라믹재료그룹 |
| Pore Structure Modification and Characterization of Porous Alumina Filter with Chemical Vapor Infiltration (CVI) SiC Whisker |
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| ABSTRACT |
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In this study, SiC whiskers were grown in porous alumina substrate in order to enhance the filtering efficiency, performance, and durability by controlling pore morphology. This experiment was performed by Chemical Vapor Infiltration (CVI) in order to obtain the whiskers on the inside of pores as well as on the surface of porous the A1$_2$O$_3$ substrate. The deposition behavior was changed remarkably with the deposition position, temperature, and input gas ratio. First, the mean diameter of whisker was decreased as the position of observation moved into the inside of substrate due to the reactant gas depletion effect'. Second, the deposition temperature caused the changes of the deposition type such as debris, whiskers and films and the change in morphology affect the various properties. When SiC films were deposited. the gas permeability and the specific surface area decreased. However, the whisker showed the opposite result. The whiskers increase not only the specific surface area and minimizing pressure drop but also mechanical strength. Therefore it is expected that the porous alumina body which deposited the SiC whisker is the promising material for the filter trapping the particles. |
| Key words:
Chemical Vapor Infiltration (CVI), SiC, Whisker, Pore structure |
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