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J. Korean Ceram. Soc. > Volume 40(12); 2003 > Article
Journal of the Korean Ceramic Society 2003;40(12): 1197.
doi: https://doi.org/10.4191/kcers.2003.40.12.1197
졸-겔법에 의한 나노 사이즈 Au 미립자 분산 ZrO2 박막의 특성
이승민, 문종수
경남대학교 신소재공학부
Properties of Nano-sized Au Particle Doped ZrO2 Thin Film Prepared by the Sol-gel Method
Thin film on SiO$_2$ glass was synthesized by a dip-coating method from the ZrO$_2$ sol which had dispersed nanosize Au particle under ambient atmosphere. After heat treatment of the prepared thin film, the characteristics were investigated by X-ray diffraction, UV-VIS spectrometer, Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM). It was found that ZrO$_2$ thin film with 100 nm thickness was crystallized to tetragonal phase at 50$0^{circ}C$. The size of dispersed Au particle was 15∼40nm and the film had a smooth surface with a roughness of 0.84 nm. The film showed nonlinearity characteristics with absorption peaks at 630∼670nm visible region because of the plasma resonance of Au metallic particles.
Key words: Sol-gel, Chelating agent, Heat treatment, Thin film
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