| Design of Shaking Beam for Piezoelectric Linear Ultrasonic Motor |
| Seok-Jin Yoon, Ji-Won Park, Sang-Jong Kim, Yeon-Tae Yu1, Hyun-Jai Kim |
Thin Film Material Research Center, KIST
1Minerals and Materials Processing Division Korea Institute of Geoscience and Mineral Resources |
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| ABSTRACT |
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Design of a piezoelectric actuator for the ultrasonic motor must ensure that contact point has elliptic trajectory of movement. The new idea of an elliptic trajectory formation of the piezoelectric actuator is investigated in the paper. Shaking beam for the piezoelectric linear ultrasonic motor was introduced to realize this new idea. The principle is based on the excitation of longitudinal and flexural vibrations of the actuator by using two sources of longitudinal mechanical vibrations shifted by $pi$/2. Mode-frequency and harmonic response analyses of the actuator based on FEM have been carried out. The moving trajectory of the contact point has been defined. Finally, The experimental research of shaking beam has been confirmed an opportunity of the elliptic trajectory reception with the help of one stable mode of the vibrations. |
| Key words:
Piezoelectric actuator, Linear motor, Shaking beam, FEM, Longitudinal and flexural vibrations |
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