| ZnO 압전 박막을 이용한 고주파 SAW 필터 연구 |
| 박용욱, 신현용 |
| 남서울대학교 전자정보통신공학부 |
| A Study on the ZnO Piezoelectric Thin Film SAW Filter for High Frequency |
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| ABSTRACT |
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ZnO thin films on glass substrate were deposited by RF magnetron reactive sputtering at 100 W, 1.33 Pa, Ar/O2=50 : 50, 200$^{circ}C$, and a target/substrate distance of 4 cm. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, AFM, RBS, and electrometer. All films showed a strong preferred c-axis orientation and the chemical stoichiometry. The propagation velocity of ZnO/IDT/glass of single electrode and double electrode types SAW filter was about 2,589 m/sec, 2,533 m/sec and insertion loss was a minimum value of about -11 dB and -21 dB, respectively. |
| Key words:
ZnO thin film, Preferred orientation, Propagation velocity, Insertion loss, ZnO/IDT/glass, SAW filter |
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