Fabrication and Properties of Au fine Particles Doped ZrO<sub>2</sub> Thin Films by the Sol-gel Method

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doi:2003.40.5.475

J. Korean Ceram. Soc. > Volume 40(5); 2003 > Article

Journal of the Korean Ceramic Society 2003;40(5): 475.
doi: https://doi.org/10.4191/kcers.2003.40.5.475

졸-겔법에 의한 Au 미립자 분산 ZrO₂ 박막의 제조와 특성

이승민, 문종수

경남대학교 신소재공학부

Fabrication and Properties of Au fine Particles Doped ZrO₂ Thin Films by the Sol-gel Method

ABSTRACT

Nanocomposite of Au doped ZrO$_2$ films was prepared, which could be used as non-linear optic materials, selective absorption and transmission films. After heat treatment of prepared thin film by dip-coating method, the characteristics were investigated by X-ray diffraction, UV-VIS Spectrometer, Atomic Force Microscopy (AFM) and Scanning Electron Microscope (SEM). Film thickness was about 150 nm, the Au particle size was 15~35 nm. The thin film had a smooth surface roughness about 1.06 nm. Nonlinearity optics was found that films showed absorption peak at 600~650 nm visible region by plasma resonance of Au metal particles.

Key words: Sol-gel, $ZrO_2$thin film, Dip-coating, Au particle, Nonlinearity